[1-1] Vacancy Distribution Theory for Ion-Implanted Target

S. Furukawa、H. Ishiwara (1.Tokyo Institute of Technology)

1970 Conference on Solid State Devices |PDF ダウンロード

[1-2] Electron Microscopic Studies of Crystal Defects in Boron and Phosphorus Implanted Silicon

M. Tamura、T. Ikeda、T. Yoshihiro (1.Hitachi Ltd.)

1970 Conference on Solid State Devices |PDF ダウンロード

T. Abe、Y. Ohmura、M. Konaka、H. Ohtsubo、M. Kanazawa、K. Koike (1.Tokyo Shibaura Electric Co., Ltd.)

1970 Conference on Solid State Devices |PDF ダウンロード

T. Okabe、E. Tanikawa (1.Fujitsu Ltd.)

1970 Conference on Solid State Devices |PDF ダウンロード

Y. Tarui、Y. Komiya、Y. Harada (1.Electrotechnical Lab.)

1970 Conference on Solid State Devices |PDF ダウンロード

M. Hirao、H. Nakashima (1.Hitachi Ltd.)

1970 Conference on Solid State Devices |PDF ダウンロード

H. Nakashima (1.Hitachi Ltd.)

1970 Conference on Solid State Devices |PDF ダウンロード

H. Nakatsuka、A. J. Domenico、G. Pearson (1.Stanford Electronics Labs.)

1970 Conference on Solid State Devices |PDF ダウンロード

H. Shiraki、J. Matsui、T. Kawamura (1.Nippon Electric Co., Ltd.)

1970 Conference on Solid State Devices |PDF ダウンロード

S. Iizima、M. Sugi、M. Kikuchi、K. Tanaka (1.Electrotechnical Lab.、2.Sophia University)

1970 Conference on Solid State Devices |PDF ダウンロード