[4-3] Study on Three-Dimensional Distribution of Implanted Ions by He+ Backscattering Technique
Hiroshi ISHIWARA, Seijiro FURUKAWA, Hideki MATSUMURA, Nobuyoshi NATSUAKI
(1.Department of Physical Electronics, Faculty of Engineering Tokyo Institute of Technology)
https://doi.org/10.7567/SSDM.1972.4-3