[4-3] Study on Three-Dimensional Distribution of Implanted Ions by He+ Backscattering Technique

Hiroshi ISHIWARA, Seijiro FURUKAWA, Hideki MATSUMURA, Nobuyoshi NATSUAKI (1.Department of Physical Electronics, Faculty of Engineering Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.1972.4-3