Aug 30, 1972 - Aug 31, 1972 The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
[S-4] Ion Implantation & Device Technology (II)
S. Namba, T. Tokuyama, M. Tsurushima, H. Ohmura (1.Osaka University, 2.Hitachi Ltd., 3.Electrotechnical Laboratory, 4.Tokyo Shibaura Electric Co., Ltd.)