Recent Advances in the Plasma-Coupled Device

T. Suzuki; K. Kawarada; Y. Yamamoto; T. Shibata; H. Kodama; A. Tamama

doi:https://doi.org/10.7567/SSDM.1973.5-3

1973 International Conference on Solid State Devices

Aug 29, 1973 - Aug 31, 1973
The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[5-3] Recent Advances in the Plasma-Coupled Device

T. Suzuki, K. Kawarada, Y. Yamamoto, T. Shibata, H. Kodama, A. Tamama (1.Musashino Electrical Communication Laboratory Nippon Telegraph and Telephone Public Corporation)

https://doi.org/10.7567/SSDM.1973.5-3

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