The Japan Society of Applied Physics

[A-1-8] New Application of Se-Ge Glasses to Silicon Microfabrication Technology

A. Yoshikawa, H. Nagai, Y. Mizushima (1.Musashino Electrical Communication Laboratory, Nippon Telegraph and Telephone Public Corporation)

https://doi.org/10.7567/SSDM.1976.A-1-8