[A-1-2] X-ray replication of masks by Synchrotron Radiation of INS-ES T. Nishimura、H. Kotani、S. Matsui、O. Nakagawa、H. Aritome、S. Namba (1.Faculty of Engineering Science Osaka University) https://doi.org/10.7567/SSDM.1977.A-1-2