[A-1-2] X-ray replication of masks by Synchrotron Radiation of INS-ES

T. Nishimura, H. Kotani, S. Matsui, O. Nakagawa, H. Aritome, S. Namba (1.Faculty of Engineering Science Osaka University)

https://doi.org/10.7567/SSDM.1977.A-1-2