[A-4-1] Arsenic Implanted Emitter and Its Application to UHF Power Transistor

K. Tsukamoto、Y. Akasaka、Y. Watari、Y. Kusano、Y. Hirose、G. Nakamura (1.LSI Development Laboratory, Kita-Itami Works, Mitsubishi Electric Corp.)

https://doi.org/10.7567/SSDM.1977.A-4-1