[A-5-3] Suppression of Oxidation-Induced Stacking Faults Formation in Silicon by High Pressure Steam Oxidation

N. Tsubouchi, H. Miyoshi, H. Abe (1.LSI Development Laboratory, Mitsubishi Electric Corp., 2.Computer Development Laboratories Limited)

https://doi.org/10.7567/SSDM.1977.A-5-3