[A-8-2] NEW IC PROCESS TECHNOLOGY
Shuichi Sato、Tadanori Yamaguchi、Douglas Ritchie、Karen Seaward、Jack Sachitano、Peter Burke
(1.Tektronix Laboratories, Tektronix, Inc.、2.Emdex, A Division of Exxon Enterprises, Inc.)
https://doi.org/10.7567/SSDM.1977.A-8-2