NEW IC PROCESS TECHNOLOGY

Shuichi Sato; Tadanori Yamaguchi; Douglas Ritchie; Karen Seaward; Jack Sachitano; Peter Burke

doi:https://doi.org/10.7567/SSDM.1977.A-8-2

1977 Conference on Solid State Devices

Aug 30, 1977 - Aug 31, 1977
The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-8-2] NEW IC PROCESS TECHNOLOGY

Shuichi Sato, Tadanori Yamaguchi, Douglas Ritchie, Karen Seaward, Jack Sachitano, Peter Burke (1.Tektronix Laboratories, Tektronix, Inc., 2.Emdex, A Division of Exxon Enterprises, Inc.)

https://doi.org/10.7567/SSDM.1977.A-8-2

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