[B-3-1] Analysis of Two-Dimensional Etching Effect on the Profiles of Fine Holographic Grating Made of Positive Photoresist AZ2400

K. Kodate, T. Kamiya, H. Takenaka, H. Yanai (1.Physics Laboratory, Japan Women's University, 2.Department of Electronic Engineering, University of Tokyo)

https://doi.org/10.7567/SSDM.1977.B-3-1