In Depth Profiles of Oxide Films on GaAs Studied by XPS

Y. Mizokawa; H. Iwasaki; R. Nishitani; S. Nakamura

doi:https://doi.org/10.7567/SSDM.1977.B-6-2

1977 Conference on Solid State Devices

1977年8月30日〜 1977年8月31日
The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[B-6-2] In Depth Profiles of Oxide Films on GaAs Studied by XPS

Y. Mizokawa、H. Iwasaki、R. Nishitani、S. Nakamura (1.Junior College of Engin ering, University of Osaka Prefecture、2.The Institute of Scientific and Industrial Research, Osaka University)

https://doi.org/10.7567/SSDM.1977.B-6-2

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