In Depth Profiles of Oxide Films on GaAs Studied by XPS

Y. Mizokawa; H. Iwasaki; R. Nishitani; S. Nakamura

doi:https://doi.org/10.7567/SSDM.1977.B-6-2

1977 Conference on Solid State Devices

Aug 30, 1977 - Aug 31, 1977
The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[B-6-2] In Depth Profiles of Oxide Films on GaAs Studied by XPS

Y. Mizokawa, H. Iwasaki, R. Nishitani, S. Nakamura (1.Junior College of Engin ering, University of Osaka Prefecture, 2.The Institute of Scientific and Industrial Research, Osaka University)

https://doi.org/10.7567/SSDM.1977.B-6-2

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