[A-0-1] A LSI FACTORY OF THE NEW AGE

P. WANG (1.TEXAS INSTRUMENTS INCORPORATED)

1977 Conference on Solid State Devices |PDF Download

[A-1-1] Direct Electron Beam Writing of Devices and Circuits on Silicon

L. D. Yau, L. R. Thibault (1.Bell Laboratories)

1977 Conference on Solid State Devices |PDF Download

T. Nishimura, H. Kotani, S. Matsui, O. Nakagawa, H. Aritome, S. Namba (1.Faculty of Engineering Science Osaka University)

1977 Conference on Solid State Devices |PDF Download

Tsunehachi Ishitani, Hideo Kodama, Tsuneta Sudo (1.Musashino Electrical Communication Laboratory / Nippon Tel.-Tel. Public Corp.)

1977 Conference on Solid State Devices |PDF Download

Yoshio Nishi, Hisashi Hara (1.Toshiba Research and Development Center Tokyo Shibaura Electric Co., Ltd.)

1977 Conference on Solid State Devices |PDF Download

T. Mochizuki, K. Shibata, T. Inoue, K. Ohuchi (1.Toshiba Reseach and Development Center Tokyo Shibaura Electric Co., Ltd.)

1977 Conference on Solid State Devices |PDF Download

Tohru Nakamura, Toshiaki Masuhara, Shojiro Asai (1.Central Research Laboratory, Hitachi, Ltd.)

1977 Conference on Solid State Devices |PDF Download

Masanori Kikuchi, Shuichi Ohya, Machio Yamagishi (1.IC Division, Nippon Electric Company Ltd.)

1977 Conference on Solid State Devices |PDF Download

N. Ieda, E. Arai, K. Kiuchi, Y. Ohmori, K. Takeya (1.Electrical Communication Laboratories, Nippon Telegraph and Telephone Public Corporation)

1977 Conference on Solid State Devices |PDF Download

O. Minato, T. Sasaki, R. Hori, M. Kubo, N. Hashimoto, H. Yoshimura (1.Central Research Laboratory, Hitachi Ltd.)

1977 Conference on Solid State Devices |PDF Download