[A-6-3] An Electron Beam Exposure System (VL-RI)

M. Sumi, M. Ninomiya, F. Chiba, M. Nakasuji, S. Sano, Y. Takeishi (1.Cooperative Laboratories, VLSI Technology Research Association)

https://doi.org/10.7567/SSDM.1978.A-6-3