[A-6-3] An Electron Beam Exposure System (VL-RI) M. Sumi、M. Ninomiya、F. Chiba、M. Nakasuji、S. Sano、Y. Takeishi (1.Cooperative Laboratories, VLSI Technology Research Association) https://doi.org/10.7567/SSDM.1978.A-6-3