[A-1-5] Electron Beam Mask Fabrication for MOSLSI's with 1 μm - 1.5 μm Design Rules

Shinji Okazaki, Kozo Mochiji, Eiji Takeda, Yoji Maruyama, Shojiro Asai (1.Central Research Laboratory, 2.Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1979.A-1-5