[B-2-3] Tin Diffusion from Doped Oxides for Fabricating GaAs Microwave Devices

N. Arnold, H. Dambkes, K. Heime (1.University of Duisburg, 2.FB 9, 3.Solid-State Electronics Department)

https://doi.org/10.7567/SSDM.1979.B-2-3