[B-5-1] A NEW HEAT TREATMENT TECHNIQUE FOR NO THERMAL CONVERSION OF SEMI-INSULATING GaAs WAFERS

T. Tanaka、S. Takamiya、M. Ishii、W. Susaki (1.Semiconductor Laboratory、2.Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.1979.B-5-1