[B-5-1] A NEW HEAT TREATMENT TECHNIQUE FOR NO THERMAL CONVERSION OF SEMI-INSULATING GaAs WAFERS

T. Tanaka, S. Takamiya, M. Ishii, W. Susaki (1.Semiconductor Laboratory, 2.Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.1979.B-5-1