Quantitative Analysis of Semiconductor Materials with Secondary Ion Mass Spectrometer

Masaharu OSHIMA; Izumi Kawashima; Shizuka YOSHII

doi:https://doi.org/10.7567/SSDM.1979.B-5-6

1979 International Conference on Solid State Devices

Aug 27, 1979 - Aug 29, 1979
The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[B-5-6] Quantitative Analysis of Semiconductor Materials with Secondary Ion Mass Spectrometer

Masaharu OSHIMA, Izumi Kawashima, Shizuka YOSHII (1.Musashino Electrical Communication Laboratory, 2.NTT Ibaragi Electrical Communication Laboratory, 3.NTT)

https://doi.org/10.7567/SSDM.1979.B-5-6

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