Quantitative Analysis of Semiconductor Materials with Secondary Ion Mass Spectrometer

Masaharu OSHIMA; Izumi Kawashima; Shizuka YOSHII

doi:https://doi.org/10.7567/SSDM.1979.B-5-6

1979 International Conference on Solid State Devices

1979年8月27日〜 1979年8月29日
The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[B-5-6] Quantitative Analysis of Semiconductor Materials with Secondary Ion Mass Spectrometer

Masaharu OSHIMA、Izumi Kawashima、Shizuka YOSHII (1.Musashino Electrical Communication Laboratory、2.NTT Ibaragi Electrical Communication Laboratory、3.NTT)

https://doi.org/10.7567/SSDM.1979.B-5-6

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