[C-2-4] Fabrication of Josephson Weak Links using Electron Beam Lithography and Ion Etching and Proposal of a New Single Flux Quantum Logic

H. Tamura, Y. Okabe, T. Sugano (1.Departments of Electrical and Electronic Engineering, 2.The University of Tokyo)

https://doi.org/10.7567/SSDM.1979.C-2-4