[C-2-4] Fabrication of Josephson Weak Links using Electron Beam Lithography and Ion Etching and Proposal of a New Single Flux Quantum Logic
H. Tamura、Y. Okabe、T. Sugano
(1.Departments of Electrical and Electronic Engineering、2.The University of Tokyo)
https://doi.org/10.7567/SSDM.1979.C-2-4