[C-3-4] Characterization of Residual Impurities in High Pure Si Crystals by Photoluminescence Technique

M. Tajima、A. Yusa、T. Abe (1.Electrotechnical Laboratory Komatsu Electronic Metals Co. Shin-Etsu Handotai Co.)

https://doi.org/10.7567/SSDM.1979.C-3-4