[B-4-1] Optical, Electrical and Structural Properties of Plasma-Deposited Amorphous Silicon

K. Tanaka、K. Nakagawa、A. Matsuda、M. Matsumura、H. Yamamoto、S. Yamasaki、H. Okushi、S. Iizima (1.Electrotechnical Laboratory)

https://doi.org/10.7567/SSDM.1980.B-4-1