[B-4-1] Optical, Electrical and Structural Properties of Plasma-Deposited Amorphous Silicon

K. Tanaka, K. Nakagawa, A. Matsuda, M. Matsumura, H. Yamamoto, S. Yamasaki, H. Okushi, S. Iizima (1.Electrotechnical Laboratory)

https://doi.org/10.7567/SSDM.1980.B-4-1