[B-4-3] Novel Deposition Technique of a-Si:H -- Silane Glow Discharge in Magnetic Field --

T. Hamasaki, M. Hirose, H. Kurata, M. Taniguchi, Y. Osaka (1.Department of Electrical Engineering, Hiroshima University)

https://doi.org/10.7567/SSDM.1980.B-4-3