[A-3-4] A New Method of Characterizing the In-depth Profile of Thermally Induced Defects in CZ Si

Hiroshi NAKAYAMA、Johji KATSURA、Taneo NISHINO、Yoshihiro HAMAKAWA (1.Faculty of Engineering Science, Osaka University)

https://doi.org/10.7567/SSDM.1981.A-3-4