[A-4-8] Trapped Ar Induced Deformation of Magnetron Sputtered Al Film Overlaid with Plasma SiN Film

H. Harada, H. Yakushiji, T. Nishioka, H. Kotani, Y. Hirata (1.LSI Research and Development Laboratory, Mitsubishi Electric Corporation Computer Development Laboratories Limited)

https://doi.org/10.7567/SSDM.1981.A-4-8