[B-2-4] Optical and Electrical Properties of Nitrogen Doped a-Si:H Films for Solid State Image Pickup Devices

Y. Shimomoto、Y. Tanaka、H. Yamamoto、S. Takasaki、T. Baji、A. Sasano、T. Tsukada (1.Central Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1981.B-2-4