[B-2-4] Optical and Electrical Properties of Nitrogen Doped a-Si:H Films for Solid State Image Pickup Devices

Y. Shimomoto, Y. Tanaka, H. Yamamoto, S. Takasaki, T. Baji, A. Sasano, T. Tsukada (1.Central Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1981.B-2-4