Growth parameter and growth model of stripe-shaped large grained silicon on insulator by electron beam annealing

[A-6-7] Growth parameter and growth model of stripe-shaped large grained silicon on insulator by electron beam annealing

Kenji Shibata, Tomoyasu Inoue, Yamichi Ohmura, Masahiro Kashiwagi (1.Toshiba Research and Development Center, Toshiba Corporation)