[A-6-8] Evaluation and Control of Grain Boundaries in Laser-Recrystallized Polysilicon Island for Device Fabrication

T. Nishimura, A. Ishizu, Y. Akasaka (1.LSI Research and Development Laboratory, Mitsubishi Electric Corporation, 2.Materials Research Laboratory, Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.1982.A-6-8