[A-5-6] Process Parameter Control in Optical Lithography

P. Antognetti, C. Fasce, W. G. Oldham (1.University of Genova, 2.University of California)

1982 International Conference on Solid State Devices |PDF Download

[A-5-7] Sub-micron Pattern Control Technology for Variable-Shaped EB Lithography

K. Suzuki, S. Hasegawa, Y. Iida, K. Mori (1.Basic Technology Research Labs., Nippon Electric Co., Ltd.)

1982 International Conference on Solid State Devices |PDF Download

M. Yoshimi, M. Takahashi, K. Kawabuchi, Y. Kato, T. Takigawa (1.Toshiba Research and Development Center, Toshiba Corporation)

1982 International Conference on Solid State Devices |PDF Download

M. Watanabe, T. Usami, S. Takasu, S. Matsuo, E. Toji (1.Toshiba Research and Development Center, 2.Toshiba Ceramics)

1982 International Conference on Solid State Devices |PDF Download

C. W. White (1.Solid State Division, Oak Ridge National Laboratory)

1982 International Conference on Solid State Devices |PDF Download

S. Saitoh, K. Higuchi, H. Okabayashi (1.Basic Technology Research Laboratories, Nippon Electric Co., Ltd.)

1982 International Conference on Solid State Devices |PDF Download

H. Ishiwara, T. Asano (1.Graduate School of Science and Engineering, Tokyo Institute of Technology)

1982 International Conference on Solid State Devices |PDF Download

J. P. COLINGE, E. DEMOULIN, D. BENSAHEL, G. AUVERT (1.C.N.E.T.)

1982 International Conference on Solid State Devices |PDF Download

M. Miyao, M. Ohkura, I. Takemoto, M. Ichikawa, M. Tamura, T. Tokuyama (1.Central Research Laboratory, Hitachi Ltd.)

1982 International Conference on Solid State Devices |PDF Download

Kenji Shibata, Tomoyasu Inoue, Yamichi Ohmura, Masahiro Kashiwagi (1.Toshiba Research and Development Center, Toshiba Corporation)

1982 International Conference on Solid State Devices |PDF Download