[A-1-3] Ultra-Smooth Heteroepitaxial NiSi2, Films on Silicon Grown by Molecular Beam Epitaxy

A. Ishizaka, Y. Shiraki, K. Nakagawa, E. Maruyama (1.Central Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1983.A-1-3