[A-1-3] Ultra-Smooth Heteroepitaxial NiSi2, Films on Silicon Grown by Molecular Beam Epitaxy A. Ishizaka、Y. Shiraki、K. Nakagawa、E. Maruyama (1.Central Research Laboratory, Hitachi, Ltd.) https://doi.org/10.7567/SSDM.1983.A-1-3