The Japan Society of Applied Physics

[A-2-3] Formation of Si Epi./MgO・Al2O3 Epi./SiO2/Si and Its Epitaxial Film Quality

Masao Mikami, Yasuaki Hokari, Koji Egami, Hideki Tsuya, Masaru Kanamori (1.Fundamental Research Laboratories and Microelectronics Laboratories, NEC Corporation)

https://doi.org/10.7567/SSDM.1983.A-2-3