[A-3-7LN] 3-Dimensional IC's Fabricated by Using Ar+ Laser Recrystallization

Nobuo Sasaki、Seiichiro Kawamura、Takashi Iwai、Ryouichi Mukai、Motoo Nakano、Mikio Takagi (1.IC Development Division, Fujitsu Limited)

https://doi.org/10.7567/SSDM.1983.A-3-7LN