[A-3-7LN] 3-Dimensional IC's Fabricated by Using Ar+ Laser Recrystallization

Nobuo Sasaki, Seiichiro Kawamura, Takashi Iwai, Ryouichi Mukai, Motoo Nakano, Mikio Takagi (1.IC Development Division, Fujitsu Limited)

https://doi.org/10.7567/SSDM.1983.A-3-7LN