[A-6-5] A New Application of Al-Si Films Coated with TiSi2 in VLSI Multi-Level Interconnections

Shohei Shima, Takahiko Moriya, Masahiro Kashiwagi (1.Toshiba Research and Development Center, Toshiba Corporation)

https://doi.org/10.7567/SSDM.1983.A-6-5