[A-6-7] Leakage Current Suppression in Amorphous Ta2O5 Films with Micro-Pinhole Growth Control

S. Kimura, Y. Nishioka, A. Shintani, K. Mukai (1.Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1983.A-6-7