[B-6-2] Growth of Selectively Doped Heterostructure by Organometallic Vapour Phase Epitaxy
Toshiyuki USAGAWA、Yuichi ONO、Susumu KAWASE、Yoshifumi KATAYAMA、Susumu TAKAHASHI
(1.Central Research Laboratory, Hitachi, Ltd.)
https://doi.org/10.7567/SSDM.1983.B-6-2