[B-6-2] Growth of Selectively Doped Heterostructure by Organometallic Vapour Phase Epitaxy

Toshiyuki USAGAWA, Yuichi ONO, Susumu KAWASE, Yoshifumi KATAYAMA, Susumu TAKAHASHI (1.Central Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1983.B-6-2