[B-6-6] Fabrication of GaInAsP/InP Hetero-Multilayers by LPE Anan Chailertvanitkul、S. Uchiyama、Y. Kotaki、Y. Kokubun、K. Iga (1.Tokyo Institute of Technology) https://doi.org/10.7567/SSDM.1983.B-6-6