[C-3-2LN] LARGE AREA EXPOSURE IN SYNCHROTRON RADIATION LITHOGRAPHY UTILIZING THE STEERING OF THE ELECTRON ORBIT IN THE STORAGE RING
Hiroshi TANINO, Koichiro HOH, Masahiro HIRATA, Shingo ICHIMURA, Nobufumi ATODA, Takio TOMIMASU, Tsutomu NOGUCHI, Suguru SUGIYAMA, Tetsuo YAMAZAKI
(1.Electrotechnical Laboratory)
https://doi.org/10.7567/SSDM.1983.C-3-2LN
