The Japan Society of Applied Physics

[A-0-1] Recent Progress in Low Temperature Photochemical Processes

Jun-ichi Nishizawa, Yoshihiro Kokubun (1.Research Institute of Electrical Communication, Tohoku University, 2.Research Development Corporation of Japan c/o Semiconductor Research Institute)

https://doi.org/10.7567/SSDM.1984.A-0-1