[A-11-3] Low Temperature Oxidation of Silicon by Microwave Discharged Oxygen Plasma

Shin-ichiro Kimura, Eiichi Murakami, Kiyoshi Miyake, Terunori Warabisako, Hideo Sunami (1.Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1984.A-11-3